National Central University Optical Sciences Center
 
 
Facility & Equipment > Ion Implantation Lab  
ĄD Compound Semiconductors Lab
ĄD Ion Implantation Lab
ĄD Micro Optoeletronic Lab
ĄD SEM Lab
ĄD OE Integration Lab.
ĄDIntroduction of the laboratory
Ion Implanter Medium current ion implanter
ULVAC IMX3500
Source :Mg,Zn,P,C,Si,O,H,N,Be
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