MOE Laboratory floor plane:
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The micro optics electrical laboratory is located at the national central university comprehensive education building fourth floor. The laboratory is included clean room, engine room, gas room, and office, and the clean room has class 10000, 1000, 100 three regions totally. The purpose of this laboratory is to provide a highly clean environment for the fabrication process developments of 4 inch silicon devices, the GaAs high frequency components, and the optics electrical elements, in order complete a sophisticated project of crossing over several academic researches. |
Facility
& Equipment > Micro Optoeletronic Lab
