National Central University Optical Sciences Center
 
 
Facility & Equipment > SEM Lab  
． Compound Semiconductors Lab
． Ion Implantation Lab
． Micro Optoeletronic Lab
． SEM Lab
． OE Integration Lab.
．Introduction of the laboratory
FE-SEM
  1. Manufacture : HITACHI
  2. Model : S-4300
  3. Purchasing Date : 2001/1
  4. Specification :
    ＊Electron Gun: Cold field Emission Type.
    ＊Resolution: High resolution condition 1.5nm (15kV)
    ＊Accelerating Voltage: 0.5 to 30kV
    ＊Anode heater
    ＊Electron Optic System Alignment: Electromagnetic deflection system.
    ＊Objective Lens Aperture:
    ＊Specimen Exchange Chamber: 100mmO
    ＊Specimen Stage:
    　a) goniometer stage
    　b) X-Y movement: 25mm X 25mm以上
    　c) Rotation: 360°
    　d) Working Distance: 5mm ~ 30mm
    　e) Tilt Angle: -5° to 45°
    ＊影像顯示：
    　1.)CRT 顯示器17-inch display monitor ｘ1 unit, or 21-inch display monitor ｘ1 unit
    　2.)scan mode
    　　TV
    　　Slow(four steps selectable)
    　　Reduced area(three steps selectable)
    　　Waveform monitoring/signal monitoring
    　　Photo (four steps selectable)
    　　Split
    　　Dual magnification
    　　Display
    　　　1.) For display(640x480x16bits)
    　　　2.) For high resolution(1280x960x8bits)
    　　　3.) For ultra-high resolution(2560x1920x8bits)
    　　Auto function: Auto brightness and contrast(ABC)
    　　Auto focus
    　　Auto stigmatism and focus
    　　Auto start
    　　Auto photographing (1: AFC→ABC→PHOTO). (2: ABC→PHOTO)
    　　Operation System: Windows NT
    ＊ Computer System: IBM PC compatible
    ＊ Live Image Resolution: 1024 x 700 upward
    ＊ Freeze Image Resolution: 2560 x 1920 (8 bit)
    ＊ TV SCAN
    ＊Electrical field movement ±30μm
    ＊Vacuum system:
    　　principles：Full auto pneumatic value control (including penning gauge 1pc& pirani gauge 2pcs.)
    　　ultima pressure：1e-7 Pa(electron gun)
    　　　　　 　 　 　7e-4 Pa(specimen chamber)
    　　Pump：electron gun : Ion pump 60L/s……...1 unit, 20L/s……...2 units
    　　Specimen chamber : Oil rotary pump 140L/min(168L/min)……..2 units
    　　Oil diffusion pump 570L/s………………….1 units
    ＊Video Printer: color ，resolution ? 325 ppi (pixel per / inch)。
Sputter
  1. Manufacture : HITACHI
  2. Model : E-1030
  3. Purchasing Date :
  4. Specification :
    ＊Discharge operation:
    ＊Type: Diode discharge magnetron type
    ＊Electrode: Usual diode discs faced to each other
    ＊Voltage: DC 0.4kV
    ＊Current: 0~35mA
    ＊Coating rate:Au: 12 nm / min, Pt: 7 nm / min
    ＊Sample size :Max. dia. 55mm, height 20mm
    ＊Rotary pump: 160 l /min，single phase AC100V 1.5 kVA
AFM
  1. Manufacture : Park Science Instrusments
  2. Model : AUTOTROBE cp
  3. Purchasing Date :
  4. Specification :
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