| ．Facility Info. |
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| Plant facilities and environment safeties: |
| In order to maintain the research environment
of the good stabilization, the clean room all establishes
the detectors and the control system to the variety
of the pressure, humidity, making internal maintenance
in clean room at safety setting range. According
to the setting blast pressure force, the temperature
and pressure were stabilized by automatic tuning
the blast pressure that transport through of HEPA
Filter. We made the back breeze system independently
of three areas to avoid unbalance pressure for the
requirement of cleanness. Equipping smoking detectors
in the back breeze area, once they detect the fumes
then stop all the breeze functions, to prevent the
extension of the fire alarm. The related plant facilities
diagram of the clean room was as follows and its
pressure, humidity conditions were shown as the
table below: |
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| 區域 |
潔淨度(級) |
溫度(oC) |
濕度(%) |
室內壓力(mmAq) |
照度(LUX) |
| 無塵室 |
100 |
22.0±1.0 |
55± 5 |
+1.5 |
500 |
| 無塵室 |
1000 |
22.0±1.0 |
55± 5 |
+1.5 |
500 |
| 無塵室 |
10000 |
22.0±1.0 |
55± 5 |
+1.5 |
500 |
| 準備室 |
N.A. |
22.0±2.0 |
55± 5 |
N.A. |
500 |
|
For the supplies of fabrication processes of the
equipments in the laboratory, we establishes (A)
the engine room, (B) the gas room, (C) the waste
water, and gas monitoring exhausts system, and (D)
the fire security supervision system etc…related
to the plant facilities for insuring the normal
operation of the equipments and the safety of operators.
(A)We supplied the electric power to the facilities
equipments and the laboratory equipments by a 10000KW
high voltage power station, this part of facilities
is shown as diagram below.
|
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| (B) For the supplies of the manufacturing process
gases, there mainly has 3000 liter capacity liquid
nitrogen tank and process gas at the gas room, and
we install special gas detecting system to carry
on the supervision and the function that have to
stop urgently, this part of facilities is shown
as diagram below. |
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| |
| (C) We dilute the waste water that the manufacturing
process exhausts with the DI water, and it transport
into the waste water tank, then delivered to the
neutralizing tank to carry on a follow-up waste
water processing. The waste gas exhausts to the
pre- waste gas scrubber, after handling through
the burn box and the adsorbor, then transport to
the central wet scrubber to dilute and exhaust into
the atmosphere. All the manufacturing process by-products
just carry on exhaust after above-mention handling,
and matched the exhaustion standards of environmental
protection department. Also we periodically do the
examination of the waste water, waste gas by qualified
manufacturer every year, the examining results are
shown as the tables below: |
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檢驗項目 |
單位 |
檢驗值(原水)91/01/15 |
檢驗值(放流水)91/01/15 |
環保署放流水標準 |
水溫 |
C |
23.6 |
24.6 |
38or35 |
氫離子濃度 |
Mg/L
|
2.8 |
6.4 |
6~9 |
懸浮固體量 |
Mg/L |
2.5
|
N.D |
50 |
生化需氧量 |
Mg/L |
3.92 |
15.8 |
30 |
鋅 |
Mg/L |
0.29 |
0.12 |
5 |
總鉻 |
Mg/L |
0.04 |
N.D |
2 |
總汞 |
Mg/L |
0.0096 |
0.0017 |
0.005 |
化學需氧量 |
Mg/L |
195 |
172 |
200 |
|
檢驗項目 |
單位 |
檢驗值(原水)92/12/17 |
檢驗值(放流水)92/12/17 |
環保署放流水標準 |
水溫 |
C |
22 |
21.8 |
38or35 |
氫離子濃度 |
Mg/L
|
1.9 |
6.7 |
6~9 |
懸浮固體量 |
Mg/L |
1.2 |
N.D |
50 |
生化需氧量 |
Mg/L |
1.69 |
23.5 |
30 |
鋅 |
Mg/L |
0.45 |
0.06 |
5 |
總鉻 |
Mg/L |
N.D |
N.D |
2 |
總汞 |
Mg/L |
0.0005 |
0.0011 |
0.005 |
化學需氧量 |
Mg/L |
413 |
111 |
200 |
|
檢驗項目 |
單位 |
檢驗值(原水)93/05/25 |
檢驗值(放流水)93/05/25 |
環保署放流水標準 |
水溫 |
C |
26.8 |
26.8 |
35 |
氫離子濃度 |
Mg/L
|
2.0 |
6.1 |
6~9 |
懸浮固體量 |
Mg/L |
2.4 |
2.6 |
50 |
生化需氧量 |
Mg/L |
165 |
26.5 |
30 |
鋅 |
Mg/L |
0.05 |
0.03 |
5 |
總鉻 |
Mg/L |
N.D |
N.D |
2 |
總汞 |
Mg/L |
0.0096 |
0.0022 |
0.005 |
化學需氧量 |
Mg/L |
381 |
182 |
200 |
|
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檢
測 結 果(91/01/25) |
空氣汙染物名稱及檢測方法
|
排 氣 組 成
|
空氣污染物濃度值
|
濃度單位 |
污染物排放量(kg/hr) |
排放標準(kg/hr) |
|
CO2 |
O2
|
CO |
| 四氫化矽(PZ)OSHA&M104.00T |
0.0% |
20.5% |
0.0% |
4.78*10-3 |
g/s(MA) |
1.72*10-3 |
0.465 |
| 總有機氣體(PP)第1小時NIEA
A433.71C |
0.0% |
20.6% |
0.0% |
4.27 |
ppm(L2) |
8.11*10-3 |
0.6 |
| 總有機氣體(PP)第2小時NIEA
A433.71C |
0.0% |
20.6% |
0.0% |
4.28 |
ppm(L2) |
8.13*10-3 |
0.6 |
|
檢
測 結 果(92/12/12) |
空氣汙染物名稱及檢測方法
|
排 氣 組 成
|
空氣污染物濃度值
|
濃度單位 |
污染物排放量(kg/hr) |
排放標準(kg/hr) |
CO2
|
O2
|
CO |
四氫化矽(PZ)OSHA&M104.00T |
0.0% |
20.5% |
0.0% |
3.24*10-5 |
g/s(MA) |
1.17*10-4 |
0.465 |
總有機氣體(PP)第1小時NIEA
A433.71C |
0.0% |
20.6% |
0.0% |
3.78 |
ppm(L2) |
4.68*10-3 |
0.6 |
總有機氣體(PP)第2小時NIEA
A433.71C |
0.0% |
20.6% |
0.0% |
3.01 |
ppm(L2) |
3.72*10-3 |
0.6 |
|
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| (D) We equipped with smoking detectors in the
back breeze area in the fire safety system, once
it detected the fume signal then stop all of the
sending breeze function, to prevent the extension
of the fire. Also its signal link to the fire alarm
is subjected latterly, the switchboard does in time
it supervision. According to the space of the laboratory
besides, we have a route layout for life, urgent
floodlights, carbon dioxide fire extinguishers and
an emergency shower machine …etc. for the safety,
all are shown as diagrams below. |
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Facility
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